Microwave Plasma Sources and Methods in Processing Technology

[b]A practical introduction to microwave plasma for processing applications at a variety of pressures[/b] In [i]Microwave Plasma Sources and Methods in Processing Technology[/i], the authors deliver a comprehensive introduction to microwaves and microwave-generated plasmas. Ideal for anyone interested in non-thermal gas discharge plasmas and their applications, the book includes detailed descriptions, explanations, and practical guidance for the study and use of microwave power, microwave components, plasma, and plasma generation. This reference includes over 130 full-color diagrams to illustrate the concepts discussed within. The distinguished authors discuss the plasmas…